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陈飞,周海,张跃飞,吕反修.钛合金表面大气压等离子体枪制备类金刚石薄膜[J].稀有金属材料与工程(英文),,():.[chen fei,zhou hai,zhang yuefei,lv fanxiu.Diamond-like Carbon Thin Films Deposited on the Ti6Al4V alloy surface by Plasma Gun at an Atmospheric Pressure[J].Rare Metal Materials and Engineering,,():.]
Diamond-like Carbon Thin Films Deposited on the Ti6Al4V alloy surface by Plasma Gun at an Atmospheric Pressure
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Received:May 25, 2010  Revised:January 11, 2011
DOI:
Key words: DLC film  Ti6Al4V  atmospheric pressure plasma gun  wear resistance
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Author NameAffiliationE-mail
chen fei Department of Materials Science and Engineering, Beijing Institute of Petrochemical Technology chenfei@bipt.edu.cn 
zhou hai Department of Materials Science and Engineering, Beijing Institute of Petrochemical Technology  
zhang yuefei Institute of Microstructure and Property of Advanced Materials, Beijing University of Technology  
lv fanxiu School of Materials Science and Engineering, University of Science and Technology  
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Abstract:
      At atmospheric pressure, diamond-like carbon (DLC) thin films were deposited on the Ti6Al4V alloy surface by a DBD plasma gun at low temperature (<350 ºC), with CH4 as a precursor and Ar as dilution gas. The structure of the DLC thin film was analyzed by Laser Raman spectroscope and X-ray photoelectron spectroscopy. The surface morphology was observed through scanning electron microscopy. The adhesion between the DLC thin film and the substrate was investigated with the scribe testing. The friction and wear behavior of the DLC thin films under dry sliding against GCr15 steel was evaluated on a ball-on-disc test rig. The results show that it is feasible to prepare a DLC thin film of 1.0 μm thickness by a plasma gun. The film is uniform and dense and the surface roughness Ra is about 13.23 nm. The critical load of adhesion force between the DLC thin film and the substrate is 31.0 N. It has been found that the DLC thin film has excellent friction- and wear-resistant behavior. The friction coefficient of the Ti6Al4V substrate is about 0.50 under dry sliding against steel, while the DLC thin film experiences much abated friction coefficient to 0.15 under the same testing condition.