罗俊锋,顾晓倩,徐国进,李勇军,贺昕,熊晓东.Co90Zr7Ta3三元合金微观组织及磁性能的研究[J].稀有金属材料与工程,0,():-.[Luo Junfeng,Gu Xiaoqian,Xu Guojin,Li Yongjun,He Xin,Xiong Xiaodong.Study on Microstructure and magnetic properties of Co90Zr7Ta3 ternary alloy[J].Rare Metal Materials and Engineering,0,():-].
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Co90Zr7Ta3三元合金微观组织及磁性能的研究
投稿时间:2020-05-11  修订日期:2020-06-12
中文关键词:  CoZrTa合金  溅射靶材  热处理  显微组织  透磁率
基金项目:国家重点研发计划项目支助项目(项目号2017YFB0305502)
中文摘要:
      本文通过金相组织观察、XRD分析和透磁率检测,研究了Co90Zr7Ta3三元合金微观组织,并通过分析材料组织与透磁率(PTF, pass through flux)变化,得到热机械处理对透磁率的影响。实验结果表明:真空熔炼制备的Co90Zr7Ta3三元合金有大量枝晶组织,主要包含Co基体和枝晶结构的(Co,Ta)11Zr2。采用轧制及热处理后,合金内部枝晶结构破碎,发生球化。合金中Co基体中的fcc相转变为hcp相,hcp相中(0001)含量的增加提高了靶材透磁率。
Study on Microstructure and magnetic properties of Co90Zr7Ta3 ternary alloy
英文关键词:CoZrTa alloy  sputtering target  heat treatment  microstructure  PTF
英文摘要:
      In this paper, the microstructure of Co90Zr7Ta3 ternary alloy and the effect of microstructure on the PTF (pass through flux) were studied by means of metallographic observation, XRD analysis and PTF measurement. The influence of thermo mechanical treatment on the permeability was obtained by analyzing the structure and PTF of the material. The results show that the ternary alloy of Co90Zr7Ta3 prepared by vacuum melting mainly contains the precipitates of Co matrix and dendrite structure of (Co,Ta)11Zr2. After rolling and heat treatment, the dendrite structure in the alloy was broken to form dispersed precipitates. At the same time, the fcc phase in Co matrix is transformed into hcp phase, and the permeability of the target is improved by increasing the orientation of (0001) in hcp phase.
作者单位
罗俊锋 有研亿金新材料有限公司 
顾晓倩 有研亿金新材料有限公司 
徐国进 有研亿金新材料有限公司 
李勇军 有研亿金新材料有限公司 
贺昕 有研亿金新材料有限公司 
熊晓东 有研亿金新材料有限公司 
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